PUR-X 1000 Circulation Heater
PUR-X 1000 has a replaceable PFA flow-tube, for contamination-free heating of liquids & gases.

APPLICATIONS:
- Semiconductor Wafer Cleaning (Wet Bench) Processes
- Heating of Photo-Resist Removal Solvents
- DI water Heating for Wafer Rinsing
- Air and Nitrogen Heating for Wafer Drying
- Heating of Acids, IPA, Piranha, NMP, etc.
- For Use with Single Pass or Recirculating Systems
FEATURES & BENEFITS:
- Fluid Path has No Contact with Heating Elements
- Media is Isolated in PFA (Teflon®) Flow-Tube (High Purity Heating)
- Allows for Safe Heating of Dangerous Liquids & Gases
- Flow-Tube is Safe for Use with Many Caustic Solvents
- Flow-Tube Is Field Replaceable (No Service Call Required)
- Compatible with Standard Controls (PID, PLC, Multi-Loop, etc.)
- Body is Teflon® Coated, for Maximum Cleanliness
- Self-Draining Flow-Tubes, and Long-Life Heating Elements
SPECIFICATIONS:
Power:
- 1.5 kW Total to 4.5 kW Total
- Voltage Range: 120 - 415 V
- Max Line Current: 30 A per circuit
Tubing:
- .375” OD (3/8”) (9.52 mm)
- .031” Wall (.80 mm)
- Overall Process Tube Length: 190" (4826 mm)
- PFA (PerFluoroAlkoxy) / Teflon® (standard)
- High Purity PFA (optional upgrade)
- Max Pressure: 70 psi (4.82 bar)
Body:
- Aluminum with Black Teflon® Protective Coating
Enclosures:
- NEMA 7 (explosion-proof)
Max Working Temperatures:
- 392°F (200°C)
Sensors:
- K or J Type Thermocouples Standard (Qty. 3)
1 for Process Control
1 for High-Limit Protection
1 for Tube Temperature Protection
Available Accessories:
- Insulating Jackets
- Straight Union Fittings
Download the
PUR-X 1000
Technical Brochure
Temperature and Pressure Charts

Dimensional Drawings

Wiring Diagrams

Detailed Images
PUR-X 1000 PFA-Tube Circulation Heater Part Numbering System

Building a PUR-X 1000 Part Number:
Use the tables below to build each section of your PUR-X 1000. After assigning letters/numbers for each applicable section, you will have a complete part number, ready to quote.
For assistance, contact CAS directly.