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SEMICONDUCTOR INDUSTRY

CAS Product Solutions in the Semiconductor Market

CAS PRODUCT SOLUTION APPLICATION
Custom Circulation Heaters Wet bench, wet strip, batch and single wafer processing. Nitrogen, DI water, stripping solvents, IPA vaporizers, steam generators

CAST-X Product Line

CAST-X 500

CAST-X 1000

CAST-X 2000

CAST-X 3000

CAST-X 4000

 
Universal Solvent Circulation Heater Standard product offering for wet bench, wet strip, batch and single wafer processing
450mm Aluminum Pedestal Heater Semiconductor processing
Semiconductor research and development
Aluminum Heat or Heat/Cool Pedestal Assemblies Heater assemblies are precision machined to customer specifications such as wafer lift pin holes, vacuum connection features and vacuum groove patterns.
Standard Aluminum Platen Heaters Off-the-shelf offering for in-chamber platen heaters for wafer bonding / CMP, photolithography, ash / strip, CVD, PECVD, PVD, ALD, prober systems, proof-of-concept projects
Custom Cast-in In-chamber platen and pedestal heaters for wafer bonding / CMP, photolithography, ash / strip, CVD, PECVD, PVD, ALD, prober systems. Heated chamber liners. Custom geometry heaters, platen and pedestal chill plates for wafer cooling stations
Assembled Products In-chamber platen and pedestal heaters for stepper / bumping, photolithography, ash / strip, CVD, PECVD, PVD, ALD, prober systems, Heated chamber lids, Clean room air heaters, valve cylinder heaters
Pure Aluminum Cast-in In-chamber platen and pedestal heaters for ash / strip, CVD
IFC E-Beam Pedestals In-chamber platen and pedestal heaters for photolithography, ash / strip, CVD, PECVD, PVD, ALD, Heated showerheads, valve heaters and other custom geometries

Solving Customer Problems with CAS Product Solutions

Semiconductor – Ultra pure nitrogen heater for semiconductor wafer drying Problem:
A customer’s existing heater was generating particle contamination. This was due to the process gas being in direct contact with the electrical heating element and from vibration between the heater element and the tank wall.
Solution:
A cast-in circulation heater was designed using electropolished 316 stainless steel tubing to eliminate the contamination found in the previous nitrogen heater. The nitrogen air heater assembly included a mounting bracket, process and high limit thermocouples and inlet and outlet weldments.

Ultra pure nitrogen heater for semiconductor wafer drying


Semiconductor - Solvent heater in wet cleaning application Problem:
Safety is a critical requirement in solvent heating applications. In addition to redundant safety features, the customer had requirements for a smaller sized, cost effective heater. The alternative solution was a large expensive heat exchanger with heating and cooling capabilities. Cooling is required in the event of an over temperature condition. The heater also needed to meet recognition requirements.
Solution:
CAS’s solvent heater was designed to provide redundant safety protection including a helix shaped tube for the solvent and cooling tube for water, integral thermocouples to signal an over temperature condition and redundant mechanical thermostat. The electrical housing meets NEMA 7 requirements for explosive environments.

Solvent heater used in wet cleaning applications


Semiconductor – Etch pedestal heater Problem:
A leading semiconductor equipment manufacturer was using a brazed pedestal heater assembly in an etch application. The part was not providing adequate temperature uniformity and was failing prematurely because the brazed heater had inconsistent contact to the heated chuck surface. This inconsistency resulted in hot spots on the heater and poor temperature
uniformity. The hot spots were the reason for premature heater failure.
Solution:
A cast-in pedestal heater was provided with a 40% better temperature uniformity. The pedestal heater utilized a tubular heater, had an e-beam welded shaft and was helium leak checked for operation in a vacuum chamber. A final cleaning operation was performed to allow direct assembly into the customer’s chamber in a cleanroom environment.

Etched Pedestal Heater

 

 
 
 
 

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