PUR-X 1000 Circulation Heater

PUR-X 1000 has a replaceable PFA flow-tube, for contamination-free heating of liquids & gases.

Product image of PUR-X 1000 Chemical Heaters featuring PFA Teflon flowtubes for warming semiconductor solvents used in wafer processing applications.

APPLICATIONS:

  • Semiconductor Wafer Cleaning (Wet Bench) Processes
  • Heating of Photo-Resist Removal Solvents
  • DI water Heating for Wafer Rinsing
  • Air and Nitrogen Heating for Wafer Drying
  • Heating of Acids, IPA, Piranha, NMP, etc.
  • For Use with Single Pass or Recirculating Systems

FEATURES & BENEFITS:

  • Fluid Path has No Contact with Heating Elements
  • Media is Isolated in PFA (Teflon®) Flow-Tube (High Purity Heating)
  • Allows for Safe Heating of Dangerous Liquids & Gases
  • Flow-Tube is Safe for Use with Many Caustic Solvents
  • Flow-Tube Is Field Replaceable (No Service Call Required)
  • Compatible with Standard Controls (PID, PLC, Multi-Loop, etc.)
  • Body is Teflon® Coated, for Maximum Cleanliness
  • Self-Draining Flow-Tubes, and Long-Life Heating Elements

SPECIFICATIONS:

Power:

  • 1.5 kW Total to 4.5 kW Total
  • Voltage Range: 120 - 415 V
  • Max Line Current: 30 A per circuit

Tubing:

  • .375” OD (3/8”) (9.52 mm)
  • .031” Wall (.80 mm)
  • Overall Process Tube Length: 190" (4826 mm)
  • PFA (PerFluoroAlkoxy) / Teflon® (standard)
  • High Purity PFA (optional upgrade)
  • Max Pressure: 70 psi (4.82 bar)

Body:

  • Aluminum with Black Teflon® Protective Coating

Enclosures:

  • NEMA 7 (explosion-proof)

Max Working Temperatures:

  • 392°F (200°C)

Sensors:

  • K or J Type Thermocouples Standard (Qty. 3)
    1 for Process Control
    1 for High-Limit Protection
    1 for Tube Temperature Protection

Available Accessories:

  • Insulating Jackets
  • Straight Union Fittings

Download the
PUR-X 1000
Technical Brochure

Temperature and Pressure Charts

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Dimensional Drawings

Wiring Diagrams

Detailed Images

PUR-X 1000 PFA-Tube Circulation Heater Part Numbering System

Image showing product configuration data for PUR-X 1000 chemical heaters from CAS, which feature plastic tubes and are often used for warming semi wafer processing solvents.

Building a PUR-X 1000 Part Number:
Use the tables below to build each section of your PUR-X 1000.  After assigning letters/numbers for each applicable section, you will have a complete part number, ready to quote.
For assistance, contact CAS directly.

VOLTAGE, POWER, CIRCUIT TYPE
Volts refers to line volts (VL ). Amps refers to line current (IL ).
Section "AA" Circuit Type
(all are single circuit)
Volts (V) Watts (kW) Amps (A)
10 THREE-PHASE DELTA 240 4.2 10.1
11 THREE-PHASE DELTA 208 3.1 8.8
12 THREE-PHASE WYE 415 4.1 5.8
13 THREE-PHASE WYE 400 3.8 5.6
14 THREE-PHASE WYE 380 3.5 5.3
15 SINGLE PHASE 200 2.9 14.6
16 SINGLE PHASE 208 3.1 15.2
17 SINGLE PHASE 220 3.5 16
18 SINGLE PHASE 230 3.8 16.8
19 SINGLE PHASE 240 4.2 17.5
20 THREE-PHASE WYE 208 4.5 12.5
21 SINGLE PHASE 120 1.5 12.5
22 SINGLE PHASE 120 3 25
TUBE MATERIAL
Please select Standard Purity or High Purity Tube Material
Section "BB" Tube Material
00 STANDARD PFA TUBING: OD = 3/8" (.375”) (9.52 mm) WALL THICKNESS = .031" (.79 mm)
01 HIGH PURITY PFA TUBING (SEMI F57 COMPLIANT) – SAME DIMENSIONS AS OPTION “00”
TEMPERATURE SENSORS
Price is built into the heater body price – simply select your preferred sensor
Section "CC" Sensor Type
JJ J-TYPE THERMOCOUPLES
KK K-TYPE THERMOCOUPLES
METRIC MOUNTING HOLES
Place an "M" in section D if metric mounting holes are required. If standard Imperial mounting holes are desired, leave section D blank.
Section "D" Metric Mounting Holes
M M8 x 1.5 Metric Tapped Mounting Holes
ACCESSORIES
These Part Numbers are totally separate from the Part Numbers for the heater
Part Number Component
274-131-1-3 PFA FITTING 3/8" STRAIGHT UNION, SEMI F57 COMPLIANT / 2 PIECES
307-0-18-1 INSULATION JACKET